Mass Flowmeters & ControllersSeries GFM Gas Mass Flowmeter
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Series GFM
Series GFM Gas Mass Flowmeter
Thermal mass flowmeter for gas flow measurement. Ranges from 0–200 SCCM to 0–50 SLM.
Key Features
- Thermal mass flow sensing
- Wide range of gas calibrations
- 0-5V or 4-20mA output
- Fast response
Specifications
Output0-5V or 4-20mA
Ranges0-200 SCCM to 0-50 SLM
Accuracy±2% FS
Typical Applications
- Laboratory gas flow
- Gas blending
- Semiconductor processing
- Research
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